Affiliation:
1. Changsha University of Science and Technology
2. Wuhan University of Technology
3. The University of Sheffield
Abstract
The glass-ceramics, whose coefficient of thermal expansion approximately matched to that of
silicon, were studied to replace conventional heat-resistant glass as substrate material for anodic bonding.
The basic glasses of the Li2O-Al2O3-SiO2 system with TiO2 and ZrO2 as nucleation agents were prepared
by melting technology, and the temperatures of nucleation and crystallization were determined. The
glass-ceramics were obtained by two-step heat-treatment method. The oriented crystallization of glasses
in gradient temperature field was studied. The crystal phases and microstructures of glass- ceramics were
analyzed. Effect of heat-treatment schedule on the coefficient of thermal expansion was discussed. The
results showed that the most of the main crystal phases of the samples were β-spodumene. The coefficient
of thermal expansion of sample was about 32.5×10-7/°C, which was approach to that of silicon.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
4 articles.
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