Author:
Kleimanov R,Komarevtsev I,Enns Y,Akulshin Y,Korshunov A,Shashkin A,Arefiev D,Kazakin A
Abstract
Abstract
The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.
Subject
General Physics and Astronomy