Affiliation:
1. Harbin Institute of Technology
2. Harbin University of Commerce
Abstract
Water-jet guided laser micromachining (WJGLM) is the new development of laser machining. It couples the focal laser beam of particular wavelength (low absorptivity of water) with the high speed water-jet which works as the multimode fiber. This paper investigated the necessary condition of coupling of laser and water-jet, and gave the fundamental research on the coupling error of laser coupling into the water-jet. On base of the analysis, the coupling unit is design for the WJGLM, the experimental results show that good cutting quality of Si wafer can be acquired by WJGLM with the coupling unit.
Publisher
Trans Tech Publications, Ltd.
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