Fabrication of Nanostructure-Based Copper Oxide Biosensor

Abstract

The purpose of this paper is to give a review of the fabrication of nanostructure-based copper oxide biosensor. This paper briefly covers processes from silicon wafer cleaning, oxidation process, silicon nitride deposition, aluminum metal deposition, pattern transfer, copper oxide sol-gel preparation and coating and lastly IV testing with the results expected from the completed device.Keywords: Nanostruture, copper oxide, biosensor, sol-gel, current-voltage testing.