Affiliation:
1. Alagappa University
2. Central Electrochemical Research Institute
Abstract
Thin films continue to become more and more integral to numerous applications in today's advancing technologies. In recent years, thin film science has grown world-wide into a major research area. The importance of coatings and the synthesis of new materials for industry have resulted in a tremendous increase of innovative thin film processing technologies. Thin film properties are strongly dependent on the method of deposition, the substrate temperature, the rate of deposition, the background pressure etc. Hardness, adhesion, non porosity, high mobility of charge carriers / insulating properties and chemical inertness, which are possible with a selection of suitable functional materials and deposition techniques. There are number of different techniques that facilitate the deposition of stable thin films of oxide materials on suitable substrates. Material properties of gallium zinc oxide thin films and all the techniques used to deposit thin films are summarized with an elaborative account along with our results.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference87 articles.
1. Kenichi Inoue, Kikuo Tominaga, Takashi Tsuduki, Michio Mikawa, Toshihiro Moriga Vacuum 83 (2009) 552.
2. H.L. Hartnagel, A.L. Dawar , A.K. Jain, C. Jagadish, Semiconducting Transparent Thin Films, p.16, Institute of Physics Publ, Bristol & Philadelphia, 1995, p.202.
3. Yen-Chin Huang , Zhen-Yu Li , Hung-hsin Chen , Wu-Yih Uen , Shan-Ming Lan, Sen-Mao Liao , Wu-Yih Uen , Shan-Ming Lan , Sen-Mao Liao, Tsun-Neng Yang, Chin-Chen Chiang Thin Solid Films 517 (2009) 5537.
4. A.F. Kohan, G. Ceder, D. Morgan, C G. Van de Walle, Phys. Rev. B 61 (2000) 15019.
5. K. -K. Kim, S. Niki, J. -Y. Oh, J. -O. Song, T. -Y. Seong, S. -T. Park, S. Fujita, S. -W. Kim, J. Appl. Phys. 97 (2005) 066103.
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献