Influence of Film Texture on Reliability of Sol-Gel Derived PZT Thin-Film Capacitors-Reference-Cited by-同舟云学术

Influence of Film Texture on Reliability of Sol-Gel Derived PZT Thin-Film Capacitors

Published:2013-07 Issue: Volume:566 Page:7-11
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Noguchi Takashi¹,Sakurai Hideaki¹,Fujii Jun¹,Doi Toshihiro¹,Watanabe Toshiaki¹,Soyama Nobuyuki¹

Affiliation:

1. Mitsubishi Materials Corporation

Abstract

Time-dependent dielectric breakdown (TDDB) of lead titanate zirconate (PZT) thin-film capacitors derived by a sol-gel deposition process has been studied. Without any change in heat treatment conditions such as temperature, ramping rate, and keeping time, the films grain size was varied by adding a small amount of organic additive to PZT sol-gel solution for a control of nucleation to form PZT oxide. The reliability was remarkably improved by fabricating interfaces with multi-annealing process, parallel to film surface when the grain size is greater than film thickness, which seems to suppress conductivity of oxygen vacancies.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.566.7.pdf

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