Modeling of Vibratory Microgyroscope with Manufacture Errors Based on Parameters Identification Theory

Abstract

This paper presents a modeling method of vibratory microgyroscope with manufacture errors based on parameters identification theroy. owing to the manufacture errors, such as quadrature error and cross-axis perturbation, the resonant vibrations of the drive mode to the sense mode are coupled not only through the Coriolis force. In reality, also by elastic forces, damping and so on. Accurate modeling and identification of manufacture errors enhance significantly the ability to compensate for the consequent errors via feedback/feedforward control strategies. In this article, a really direct model with manufacture errors of the microgyroscope is proposed and the parameters of the model are identified with Frequency-Response Analysis (FRA) and State-Space-based system-identification approach.