Abstract
In order to realize more compact and in particular cost-effective spectrometers MOEMS technology offers attractive possibilities. Based Littrow spectrometer structure for the near-IR, a micro mirror grating spectrometer has been designed and developed. The ZEMAX was used for designed this structure. The resolution of this design is 10nm, the spectral range from 900nm to 1400nm. A scanning micro mirror is the key element of this IR spectrometer set-up. This micro mirror is driven by electromagnetic force. Before fix the micro mirror, it was calibrated. Meanwhile, for reducing the cost of this system, the silicon silt was designed and fabricated. For resolution testing of this spectral system, we used one light correction filters finished this experiment. The test result has shown the resolution of this spectrometer is16.8nm. Finally, the relation between the spectral line scanning characteristic and wavelength spectral resolution was discussed.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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