Affiliation:
1. Graduate School of Chosun University
2. Chosun University
Abstract
In this study, piezoelectric actuator, flexure guide, power transmission element and control method are considered for nanopositioning system apparatus. The main objectives of this thesis were to develop 2-axis nanostage which enables 2-axis control with the aid of piezoelectric actuator, and to improve the precision of the ultra-precision lathe (UP2) which is responsible for the ductile mode machining of the hardened-brittle material where the machining uses a the single-crystal diamond. Through simulation and experiments on ultra-precision positioning, stability and priority of the nanopositioning system with 2-axis nanostage and control algorithm are developed using Matlab/Simulink. Then the system, is applied to analyze surface morphology of the titanium alloy (Ti-6Al-4V)
Publisher
Trans Tech Publications, Ltd.