Surface Evolution of 4H-SiC(0001) during In Situ Surface Preparation and its Influence on Graphene Properties

Author:

ul Hassan Jawad1,Meyer Axel2,Cakmakyapan Semih3,Kazar Ozgur3,Ingo Flege Jan2,Falta Jens1,Ozbay Ekmel3,Janzén Erik1

Affiliation:

1. Linköping University

2. University of Bremen

3. Bilkent University

Abstract

The evolution of SiC surface morphology during graphene growth process has been studied through the comparison of substrate surface step structure after in-situ etching and graphene growth in vacuum. Influence of in-situ substrate surface preparation on the properties of graphene was studied through the comparison of graphene layers on etched and un-etched substrates grown under same conditions.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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