Research on Preparation Technology of High Quality Diamond Film-Reference-Cited by-同舟云学术

Research on Preparation Technology of High Quality Diamond Film

Published:2013-03 Issue: Volume:749 Page:392-400
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Zhou Chang Geng¹,Qiu Rui²,Ke Jian Lin²,Liu Cai Lin³,Wang Bing³

Affiliation:

1. Chinese Academy of Engineering Physics (CAEP)

2. China University of Mining and Technology (Beijing)

3. Southwest University of Science and Technology

Abstract

The diamond films deposition experiment is carried out with MPCVD system. Some technology problems are discussed respectively, such as the substrate pretreatment, gases source compositions and deposition temperature. XRD pictures with different peaks illustrated that diamond film has good crystal orientation. A density of film crystal is observed and a thickness uniformity in detected by Scanning Electron Microscopy (SEM). The pureness of the diamond film was measured by Raman spectroscopy. The parameter coincidence rate is 90% based on the 10 prepared samples

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.749.392.pdf

Reference11 articles.

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