Nanomorphology of Aluminum Oxide Layer after Argon Ion Bombardment

Abstract

Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studied the interaction of argon ions with a natural oxide layer of polycrystalline aluminum. It was found that the bombardment of argon ions with an energy lower sputtering threshold Al2O3leads to accumulation of ions bombarding the interstitial voids in the surface, thereby forming a solid solution of atoms of the target, the argon ions and nitrogen ion beam, the captured residual gas from the chamber of the spectrometer.