A closed-loop ΣΔ modulator for micromechanical capacitive sensors
Author:
Affiliation:
1. MEMS Center, Harbin Institute of Technology
2. State Key Laboratory of Urban Water Resource and Environment, Harbin Institute of Technology
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.jstage.jst.go.jp/article/elex/15/4/15_15.20171112/_pdf
Reference11 articles.
1. [1] H. Kulahet al.: “Noise analysis and characterization of a sigma-delta capacitive micro-accelerometer,” IEEE J. Solid-State Circuits 41 (2006) 352 (DOI: 10.1109/JSSC.2005.863148).
2. [2] H. Xuet al.: “A closed-loop interface for a high-q micromechanical capacitive accelerometer with 200 ng/√Hz input noise density,” IEEE J. Solid-State Circuits 50 (2015) 2101 (DOI: 10.1109/JSSC.2015.2428278).
3. [3] L. Yaoet al.: “A 1-V 140-µW 88-dB audio sigma-delta modulator in 90-nm CMOS,” IEEE J. Solid-State Circuits 39 (2004) 1809 (DOI: 10.1109/JSSC.2004.835825).
4. [4] J. M. de la Rosaet al.: “A CMOS 110-dB@40-kS/s programmable-gain chopper-stabilized third-order 2-1 cascade sigma-delta modulator for low-power high-linearity automotive sensor ASICs,” IEEE J. Solid-State Circuits 40 (2005) 2246 (DOI: 10.1109/JSSC.2005.857356).
5. [5] X. Liuet al.: “A low noise sigma-delta microaccelerometer interface circuit,” IEICE Electron. Express 11 (2014) 20140315 (DOI: 10.1587/elex.11.20140315).
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