Investigation of endurance degradation for 3-D charge trap NAND flash memory with bandgap-engineered tunneling oxide
Author:
Affiliation:
1. Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Computer Science, Seoul National University
2. NAND Tech. Development Division, SK hynix Inc.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.jstage.jst.go.jp/article/elex/19/24/19_19.20220465/_pdf
Reference31 articles.
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2. [2] R. Katsumata, et al.: “Pipe-shaped BiCS flash memory with 16 stacked layers and multi-cell operation for ultra high density storage device,” IEEE Symposium on VLSI Technology (2009).
3. [3] E.-S. Choi and S.-K. Park: “Device considerations for high density and highly reliable 3D NAND Flash cell in near future,” IEEE Int. Electron Device Meeting (2012) 211 (DOI: 10.1109/IEDM.2012.6479011).
4. [4] H. Kim, et al.: “Evolution of NAND flash memory: From 2D to 3D as a storage market leader,” IEEE International Memory Workshop (2017) 1 (DOI: 10.1109/IMW.2017.7939081).
5. [5] K. Parat and A. Goda: “Scaling trends in NAND flash,” IEEE International Electron Devices Meeting (2018) 27 (DOI: 10.1109/IEDM.2018.8614694).
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