Millimeter-wave transmission line with through-silicon via for RF-MEMS devices
Author:
Affiliation:
1. Advanced Technology R&D Center, Mitsubishi Electric Co.
2. Information Technology R&D Center, Mitsubishi Electric Co.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.jstage.jst.go.jp/article/elex/10/16/10_10.20130565/_pdf
Reference23 articles.
1. [1] S. Lucyszyn: Advanced RF MEMS (Cambridge University Press, Cambridge, 2010).
2. [2] G. M. Rebeiz: RF MEMS: Theory, Design, and Technology (John Wiley & Sons, Hoboken, New Jersey, 2003).
3. [3] J. Schoebel, T. Buck, M. Reimann, M. Ulm, M. Schneider, A. Jourdain, G. J. Carchon and H. A. C. Tilmans: IEEE Trans. Microw. Theory Tech. 53 [6] (2005) 1968.
4. [4] S. Ogawa, S. Soda, S.-S. Lee, S. Izuo and Y. Yoshida: Sensors and Actuators A: Physical 181 (2012) 77.
5. [5] Y. Yoshida, Y. Koga, A. Yamashita, K. Nishizawa, Y. Yokoyama, Y. Fujii, T. Hamaguchi, T. Nishino, M. Taguchi and M. Takeda: MEMS (2006) 874.
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