An Analysis of Local BTI Variation with Ring-Oscillator in Advanced Processes and Its Impact on Logic Circuit and SRAM

Author:

IGARASHI Mitsuhiko1,UCHIDA Yuuki1,TAKAZAWA Yoshio1,YABUUCHI Makoto1,TSUKAMOTO Yasumasa1,SHIBUTANI Koji1,KOBAYASHI Kazutoshi2

Affiliation:

1. Renesas Electronics Corporation

2. Kyoto Institute of Technology

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Signal Processing

Reference31 articles.

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3. [3] S.-Y. Wu, C.Y. Lin, M.C. Chiang, J.J. Liaw, J.Y. Cheng, S.H. Yang, C.H. Tsai, P.N. Chen, T. Miyashita, C.H. Chang, V.S. Chang, K.H. Pan, J.H. Chen, Y.S. Mor, K.T. Lai, C.S. Liang, H.F. Chen, S.Y. Chang, C.J. Lin, C.H. Hsieh, R.F. Tsui, C.H. Yao, C.C. Chen, R. Chen, C.H. Lee, H.J. Lin, C.W. Chang, K.W. Chen, M.H. Tsai, K.S. Chen, Y. Ku, and S.M. Jang, “A 7nm CMOS platform technology featuring 4th generation FinFET transistors with a 0.027um2 high density 6-T SRAM cell for mobile SoC application,” IEDM, pp.298-301, 2016. DOI: 10.1109/IEDM.2016.7838333. 10.1109/iedm.2016.7838333

4. [4] W.C. Jeong, D.J. Kwon, K.J. Nam, W.J. Rim, M.S. Jang, H.T. Kim, Y.W. Lee, J.S. Park, E.C. Lee, D.W. Ha, C.H. Park, S. Maeda, H.-J. Cho, S.-M. Jung, H.K. Kang, H.J. Lee, K.W. Lee, T.J. Lee, D.W. Park, B.S. Kim, J.H. Do, and T. Fukai, “True 7nm platform technology featuring smallest FinFET and smallest SRAM cell by EUV, special constructs and 3rd generation single diffusion break,” IEEE Symposium on VLSI Technology, pp.59-60, 2018. DOI: 10.1109/VLSIT.2018.8510682. 10.1109/vlsit.2018.8510682

5. [5] Y.-H. Lee, N. Mielke, B. Sabi, S. Stadler, R. Nachman, and S. Hu, “Effect of pMOST bias-temperature instability on circuit reliability performance,” IEEE International Electron Devices Meeting 2003, Washington, DC, USA, pp.14.6.1-14.6.4, 2003. DOI: 10.1109/IEDM.2003.1269297. 10.1109/iedm.2003.1269297

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