Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip
Author:
Affiliation:
1. Tokyo Institute of Technology
2. Chuo University
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,Software
Link
https://www.jstage.jst.go.jp/article/transcom/E100.B/5/E100.B_2016EBT0004/_pdf
Reference11 articles.
1. [1] C.H. Doan, S. Emami, D.A. Sobel, A.M. Niknejad, and R.W. Brodersen, “Design considerations for 60GHz CMOS radios,” IEEE Commun. Mag., vol.42, no.12, pp.132-140, Dec. 2004.
2. [2] B. Razavi, “Design of millimeter-wave CMOS radios: A tutorial,” IEEE Trans. Circuits Syst. I, Reg. Papers, vol.56, no.1, pp.4-16, Jan. 2009.
3. [3] K. Okada, K. Kondou, M. Miyahara, M. Shinagawa, H. Asada, R. Minami, T. Yamaguchi, A. Musa, Y. Tsukui, Y. Asakura, S. Tamonoki, H. Yamagishi, Y. Hino, T. Sato, H. Sakaguchi, N. Shimasaki, T. Ito, Y. Takeuchi, N. Li, Q. Bu, R. Murakami, K. Bunsen, K. Matsushita, M. Noda, and A. Matsuzawa, “Full four-channel 6.3-Gb/s 60-GHz CMOS transceiver with low-power analog and digital baseband circuitry,” IEEE J. Solid-State Circuits, vol.48, no.1, pp.46-65, Jan. 2013.
4. [4] A. Tsuchiya and H. Onodera, “Patterned floating dummy fill for on-chip spiral inductor considering the effect of dummy fill,” IEEE Trans. Microw. Theory Techn., vol.56, no.12, pp.3217-3222, Dec. 2008.
5. [5] Y. Ono, T. Hirano, K. Okada, J. Hirokawa, and M. Ando, “Eigenmode analysis of propagation constant for a microstrip line with dummy fills on a Si CMOS substrate,” IEICE Trans. Electron., vol.E94-C no.6, pp.1008-1015, June 2011.
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