A Low-Noise RF Voltage-Controlled Oscillator Using On-Chip High-Q Three-Dimensional Coil Inductor and Micromachined Variable Capacitor

Author:

Young D.J.,Malba V.,Ou J-J.,Bernhardt A.F.,Boser B.E.

Publisher

Transducer Research Foundation, Inc.

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. MEMS Processing and Fabrication Techniques and Technology—Silicon-Based Micromachining;Microsystems and Nanotechnology;2012

2. Design of wide range MEMS tunable capacitor for RF applications;Microsystem Technologies;2010-12-09

3. Rf Mems;Electrical Engineering Handbook;2007-12-22

4. 10.2207/jjws.76.472;JOURNAL OF THE JAPAN WELDING SOCIETY;2007

5. Surface micromachined arch-shape on-chip 3-D solenoid inductors for high-frequency applications;Journal of Micro/Nanolithography, MEMS, and MOEMS;2003-10-01

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