1. Howe R. T., (1995), Recent advances in surface micromachining. IEEJ Tech. Dig. 13th Sensor Symp., 1–8
2. Petersen K. E., (1982), Silicon as a mechanical material. In Proc. IEEE 70: 420–457
3. Bustillo J. M., R. T. Howe, and R. S. Muller, (1998), Surface micromachining for microelectromechanical systems. Proc. IEEE, 86: 1552–1574
4. Core T. A., W. K. Tsang, and S. J. Sherman, (1993), Fabrication technology for an integrated surface-micromachined sensor. Solid State Technol, 36: 39–47
5. Hornbeck L. J., (1995), Projection displays and MEMS: timely convergence for a bright future. Proceedings of SPIE, Texas, USA, 1995, 2