Author:
Feng Z.,Zhang H.,Zhang W.,Su B.,Gupta K.C.,Bright V.M.,Lee Y.-C.
Publisher
Transducer Research Foundation, Inc.
Cited by
7 articles.
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2. Rf Mems;Electrical Engineering Handbook;2007-12-22
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4. RF CMOS MEMS;Advanced Micro and Nanosystems;2005-01-26
5. Numerical analysis of theoretical model of the RF MEMS switches;Acta Mechanica Sinica;2004-04