Author:
Lixian Zhang,Tongxi Yu,Yapu Zhao
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Reference13 articles.
1. Yao JJ. Topical review: RF MEMS from a device perspective.J Micromech Microeng, 2000, 10: R9-R38
2. Nguyen CT. Microelectromechanical devices for wire-less communications. In: IEEE MEMS'98, Heidelberg, Germany, 1998. 1–7
3. Feng ZP, Zhang HT, Zhang WG, et al. MEMS-based variable capacitor for millimeter-wave applications. In: Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 2000. 255–258
4. Elders J, Spiering V, Walsh S. Microsystems Technology (MST) and MEMS applications: an overview.Microelectromechanical Systems: Technology and Applications (MRS Bulletin), 2001, 26 (4): 312–317
5. Peterson KE. Micromechanical membranes switches on silicon.IBM J Res Dev, 1979, 23: 376–385
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