Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. 1. V.I. Lavrenyuk, V.A. Makara, Heat-strained state of a multilayer semiconductor structure // Problemy Prochnosti, N 10, pp. 116-120 (1983) (in Russian).
2. 2. T. Suzuki, A. Mimura, T. Ogawa, The deformation of polycrystalline silicon deposited on oxide-covered single-crystal silicon substrates // J. Electrochem. Soc., 124(11), pp.1777-1782 (1977).
3. 3. E.A. Boguslavsky, An equation for shrinkage deflection in the layered silicon single crystal-oxide-polycrystal heterostructures // Elektronnaya Tekhnika, Ser.6, N 7, pp. 81-87(1976) (in Russian).