1. V. G. Litovchenko, The Physics of Semiconductor Film Systems [in Russian], Naukova Dumka, Kiev (1980).
2. I. P. Stepanenko, Principles of Mircoelectronics [in Russian], Sov. Radio, Moscow (1980).
3. I. A. Birger, Residual Stresses [in Russian], Mashgiz, Moscow (1963).
4. A. Yu. Malinin, Yu. D. Chistyakov, I. V. Korobov, et al., ?Production of silicon matrices with dielectric insulation for integrated circuits,? Elektron. Tekh., Ser. 6, No. 8, 117?124 (1972).
5. T. Suzuki, A. Mimura, and T. Ogawa, ?The deformation of polycrystalline silicon deposited on oxide covered single crystal silicon substrates,? J. Electrochem. Soc.,124, No. 11, 1777?1780 (1977).