1. 1. X. Liu, K. Song, R.W. Davis, M.H. Hu, and C.-E. Zah, in Proceedings of the 54th Conference on Electronic Components and Technology (2004), Vol. 1, p. 798.
2. 2. B.-Z. Li, S.-F. Zhou, F. Hong, G.-B. Jiang, P. Liu, A.-M. Zhang, and M. Chao, J. Vac. Sci. Technol. B 6, 1974 (1988).
3. Visn. Kyiv.;Koval';Univ Ser Fiz Mat Nauky,2007
4. The reaction of atomic oxygen with Si(100) and Si(111)
5. Passive and Active Oxidation of Si(100) by Atomic Oxygen: A Theoretical Study of Possible Reaction Mechanisms