Peculiarities of changes in the structure and electrophysical characteristics of n-Si under the effect of various thermal treatment regimes

Author:

Gaidar G.P.,

Publisher

National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)

Reference14 articles.

1. 1. Bukowski, A. (2013). Czochralski-grown silicon crystals for microelectronics. Acta Physica Polonica A, 124, No. 2, pp. 235-238. https://doi.org/10.12693/APhysPolA.124.235

2. 2. Chervonyi, I. F., Kutsova, V. Z., Pozhuiev, V. I., Shvets, E. Ia., Nosko, O. A., Yehorov, S. H. & Voliar, R. M. (2009). Semiconductor silicon: Theory and technology of production. Zaporozhye: Zaporizka derzhavna inzhenerna akademiia (in Ukrainian).

3. 3. El-Kareh, B. (2009). Silicon devices and process integration. Deep submicron and nano-scale technologies. New York: Springer Science+Business Media, LLC.

4. 4. Baranskii, P. I., Belyaev, O. E., Gaidar, G. P., Kladko, V. P. & Kuchuk, A. V. (2014). Problems of the diagnostics of real semiconductor crystals. Kyiv: Naukova Dumka (in Ukrainian).

5. 5. Murin, L. I., Lindstrom, J. L., Davies, G. & Markevich, V. P. (2006). Evolution of radiation-induced carbon-oxygen-related defects in silicon upon annealing: LVM studies. Nucl. Instrum. Meth. Phys. Res. B, 253, No. 1-2, pp. 210-213. https://doi.org/10.1016/j.nimb.2006.10.029

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