Selective dry etching of GaAs/AlO x for realizing electrical isolation on monolithic integrated photonic crystal laser array
Author:
Funder
Japan Society for the Promotion of Science
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.35848/1347-4065/aba6fc/pdf
Reference32 articles.
1. Optical I/O Technology for Tera-Scale Computing
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3. Photonic Crystal Circular Defect (CirD) Laser
4. Lateral-Current-Injection Type Membrane DFB Laser With Surface Grating
5. Sub-milliampere threshold operation of butt-jointed built-in membrane DFB laser bonded on Si substrate
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