Author:
Zuo Rubing,Miyazaki Shunsuke,Kinoshita Ryosei,Ye Hanqiao,Morita Masaya,Kaichi Kenta,Morifuji Masato,Kajii Hirotake,Maruta Akihiro,Kondow Masahiko
Abstract
To develop the CirD laser, which will be used in intra-chip optical interconnects, we investigate a new method to measure the oxidation width of AlGaOx precisely so that we can obtain the most appropriate Q factor.