Design of low loss at high frequency and integrated scanning microwave probe gripper

Abstract

Abstract We have designed a gripper for scanning microwave microscopy (SMM) based on atomic force microscopy, which is optimized for impedance-matching structures and high-frequency microwave loss. The gripper is simple in construction and highly integrated. The return loss near the target operating frequency of 20 GHz is less than −30 dB. The minimum detected power reach −40 dBm with the order of nW. The microwave scanning image of the sample surface structure was experimentally tested, showing that the gripper can be applied to microwave scanning imaging. The research results have contributed to the development of SMM.