Simulations of novel compact separator for extracting specific reactive ions from large plasma source

Abstract

Abstract A new remote dry processing with a focusing and deflection system is proposed to accurately control the energy, flux, and arrival position of reactive particle species on the nanoscale. The trajectory simulations of the negative ion extraction and transport for designing a compact separator based on the concept are performed using the SIMION software. In the compact separator, the ion beam extracted from a plasma source can be deflected in two stages through two pairs of magnets by selecting only specific ions so that it can be laterally drawn out. It is shown from the results of the simulation that the ion beams with good focusing properties, high directivity, and a sufficient current amount can be successfully extracted from the plasma source and transported to the reactor vessel through the focusing and deflection system.