Rapid annealing of Au thin films by micron chevron-shaped laser beam scanning toward growth of single-grain crystal
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.35848/1347-4065/abdf22/pdf
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1. Infinite lateral growth of (001) single crystal strip in Ge film on SiO2 by micro-chevron laser scanning method;Japanese Journal of Applied Physics;2024-01-04
2. Characteristics and deviation of low-temperature FD-SOI-MOSFETs using a sputtering SiO2 gate insulator;Japanese Journal of Applied Physics;2023-02-14
3. Water-Immersion Laser-Scanning Annealing for Improving Polycrystalline Au Films;ACS Omega;2022-11-07
4. 34.2: Invited Paper: High performance single crystal Si TFTs fabricated on single crystal Si strip formed by micro‐chevron laser beam scanning;SID Symposium Digest of Technical Papers;2021-08
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