Thermally-induced nanoscale phase change in chalcogenide glass Cr2Ge2Te6 revealed by scanning tunneling microscopy

Abstract

Abstract Cr2Ge2Te6 (CrGT) is viewed as an important phase change material (PCM) for next-generation nonvolatile memory devices because of its superior properties, e.g., high thermal stability and low operation energy, compared to conventional PCMs. However, the phase change mechanism of CrGT remains unsolved, especially at the nanoscale. Here, we investigated thermally induced nanoscale phase changes of CrGT thin films using scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS). By performing statistical analysis of the measured STM topographic and STS data, we evaluated the inhomogeneity and distribution of the phase change characteristics of CrGT thin films. We also related the nanoscale phase change properties of CrGT to macroscopic phase changes by comparing the STM and STS results with experimental data from Raman spectroscopy.