Influence of the temperature and substrate modification on the formation of continuous GaSb film on Si(111) by solid phase epitaxy

Abstract

Abstract The solid-state formation of gallium antimonide on Si(111) from a stoichiometric mixture of GaSb in the temperature range of 300 °C–500 °C and thicknesses of 12–40 nm was studied under ultrahigh vacuum conditions. The influence of the preformed GaSb seed islands on the morphology, composition, and structure was studied. It has been found that at 300 °C a strained continuous polycrystalline film is formed, which rupture at 350 °C. It has been shown that a continuous single-crystal GaSb film grows at 400 °C–500 °C if the sample is annealed at a weak antimony flow. This is also facilitated by the preliminary formation of a high density of nanosize GaSb seed islands. As a result, a continuous relaxed film with epitaxial relations GaSb(111)∣∣Si(111) and GaSb[1–10]∣∣Si[1–10] was obtained from a GaSb mixture 40 nm thick at 500 °C. We demonstrate a possibility of direct formation of GaSb on Si(111) without buffer layers of other chemical elements.