Author:
Lai Chiung Hui,Lin Bo Chun,Chang Kow Ming,Hsieh Kuang Yeu,Lai Yi Lung
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
3 articles.
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1. Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-03
2. Physical properties of (La,Sr)Ti(O,N)3 thin films grown by pulsed laser deposition;Materials Research Bulletin;2008-06
3. Ultrathin decoupled plasma nitridation SiON gate dielectrics prepared with various rf powers;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007