Semianalytical Finite Element Method Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference9 articles.
1. Analytical solution for capacitive RF sheath
2. Sheath Model for Dual-Frequency Capacitively Coupled Plasmas
3. Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method
4. Radiofrequency sheath fields above a metal-dielectric interface
5. Radio frequency sheath formation and excitation around a stepped electrode
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1. Semi-analytical model for a static sheath including a weakly collisional presheath;Japanese Journal of Applied Physics;2018-05-08
2. Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics;Japanese Journal of Applied Physics;2014-07-25
3. Discrete and modal focusing effects: principles and applications;Plasma Physics and Controlled Fusion;2012-11-21
4. Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface;Japanese Journal of Applied Physics;2011-03-22
5. Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface;Japanese Journal of Applied Physics;2011-03-01
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