Experimental Conditions Required to Achieve Low-Power Pulsed-Laser Annealing of Implanted GaAs
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review;Materials;2023-12-16
2. Electrical and optical characterization of a Zn-implanted InP laser annealed in a nitrogen atmosphere;Semiconductor Science and Technology;2007-02-13
3. The kinetics of point defects in low-power pulsed laser annealing of ion-implanted CdTe∕CdMnTe double quantum well structures;Journal of Applied Physics;2005-10-15
4. Temperature and ion flux dependence of damage structures in Zn+ implanted and laser annealed GaAs;Journal of Physics D: Applied Physics;2002-10-22
5. High resolution transmission electron microscopy of elevated temperature Zn+ implanted and low-power pulsed laser annealed GaAs;Journal of Applied Physics;2000-08-15
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