Author:
Arimoto Hiroshi,Miyauchi Eizo,Hashimoto Hisao
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Praseodymium alloy ion source for focused ion beam implantation in superconductors;Review of Scientific Instruments;1996-03
2. Focused ion beam lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-03
3. Chapter 2 Focused Ion Beam Implantation TechnologyS;Semiconductors and Semimetals;1990
4. Effects of ambient gases on ion emission stability of liquid-metal ion sources;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1987-09