Reduction of Ohmic Contact Resistance on n-Type 6H-SiC by Heavy Doping-Reference-Cited by-同舟云学术

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Reduction of Ohmic Contact Resistance on n-Type 6H-SiC by Heavy Doping

Published:1995-01-01 Issue:Part 2, No. 1A Volume:34 Page:L7-L9
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Uemoto Tsutomu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 53 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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