Microstructure Observation of “Crystal-Originated Particles” on Silicon Wafers

Author:

Miyazaki Morimasa,Miyazaki Sumio,Yanase Yoshio,Ochiai Takashi,Shigematsu Tatsuhiko

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Defects in Monocrystalline Silicon;Springer Handbook of Electronic and Photonic Materials;2017

2. Control of Intrinsic Point Defects in Single-Crystal Si and Ge Growth from a Melt;Defects and Impurities in Silicon Materials;2015

3. Post-Breakdown Characteristics of Extrinsic Failure Modes for Ultra-Thin Gate Oxides;2006 IEEE International Reliability Physics Symposium Proceedings;2006-03

4. Defects in Monocrystalline Silicon;Springer Handbook of Electronic and Photonic Materials;2006

5. New approach to remove crystal originated pits in Czochralski-grown silicon: combination of germanium ion implantation with solid-phase epitaxy;Journal of Crystal Growth;2004-11

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