Initial Cu Growth in Cu-Seeded and Ru-Lined Narrow Trenches for Supercritical Fluid Cu Chemical Deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference16 articles.
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2. Characteristics of copper deposition in a supercritical CO2 fluid
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4. Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition
5. Supercritical Fluid Fabrication of Metal Nanowires and Nanorods Templated by Multiwalled Carbon Nanotubes
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2. Agglomeration and diffusion in Cu thin films under supercritical CO2annealing;Japanese Journal of Applied Physics;2015-04-15
3. Supercritical fluid chemical deposition of Cu in Ru and TiN-lined deep nanotrenches using a new Cu(I) amidinate precursor;Microelectronic Engineering;2015-04
4. Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (1) Reaction Mechanism and Kinetics;JOURNAL OF CHEMICAL ENGINEERING OF JAPAN;2014
5. In-situSpectroscopic Ellipsometry of the Cu Deposition Process from Supercritical Fluids: Evidence of an Abnormal Surface Layer Formation;Japanese Journal of Applied Physics;2012-05-21
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