Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO3/Pt Capacitors at Low Substrate Temperatures-Reference-Cited by-同舟云学术

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Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO3/Pt Capacitors at Low Substrate Temperatures

Published:2003-02-15 Issue:Part 1, No. 2A Volume:42 Page:549-553
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Shye Der-Chi,Hwang Chuan-Chou,Lai Ming-Jiunn,Jaing Cheng-Chung,Chen Jyh-Shin,Huang Stewart,Juang Miin-Horng,Chiou Bi-Shiou,Cheng Huang-Chung

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=2R/a=549/pdf

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