Author:
Kohno Motohiro,Kitajima Toshikazu,Hirae Sadao,Yokoyama Shin
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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1. Methods for Assessing Surface Cleanliness;Developments in Surface Contamination and Cleaning, Volume 12;2019
2. References;Developments in Surface Contamination and Cleaning, Volume 12;2019
3. Methods for Monitoring and Measuring Cleanliness of Surfaces;Developments in Surface Contamination and Cleaning;2012
4. Investigation of Surface Contamination on Silicon Oxide after Hydrofluoric Acid Etching by Noncontact Capacitance Method;Japanese Journal of Applied Physics;2003-12-10