Author:
Takai Mikio,Nakai Hiroyuki,Nakashima Shin-ichi,Minamisono Tadanori,Gamo Kenji,Namba Susumu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
12 articles.
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1. Buried oxide layers formed by oxygen implantation on screened oxide silicon wafers: structural analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-01
2. Pattern formation techniques in photochemical etching;Thin Solid Films;1992-10
3. Raman measurement of local SOI structure by SIMOX;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Laser-Driven Etching;Thin Film Processes;1991
5. Strain Characterization of Semiconductor Structures and Superlattices;Light Scattering in Semiconductor Structures and Superlattices;1991