Boundary Structure of Mo/Si Multilayers for Soft X-Ray Mirrors-Reference-Cited by-同舟云学术

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Boundary Structure of Mo/Si Multilayers for Soft X-Ray Mirrors

Published:2002-05-15 Issue:Part 1, No. 5A Volume:41 Page:3052-3056
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ishino Masahiko,Yoda Osamu,Haishi Yasuyuki,Arimoto Fumiko,Takeda Mitsuhiro,Watanabe Seiichi,Ohnuki Somei,Abe Hiroaki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=5R/a=3052/pdf

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparison of thermal stability of Mo/Si multilayers with different crystallinities of Mo layers;Applied Optics;2023-03-24

2. Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask;Micromachines;2023-02-24

3. Interface characterization in B-based multilayer mirrors for next generation lithography;Thin Solid Films;2016-08

4. Evaluation of Ion Milled Soft X-ray Multilayer Mirrors for Reflection Wavefront Correction;Journal of the Vacuum Society of Japan;2010

5. Evaluating the Optical Index of Ta and Ta-Based Absorbers for an Extreme Ultraviolet Mask Using Extreme Ultraviolet Reflectometry;Japanese Journal of Applied Physics;2008-06-20

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