Author:
UMETSU Hiroo,SAKAI Yu,TSURU Toshihide,YAMAMOTO Masaki
Publisher
The Vacuum Society of Japan
Subject
Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science
Reference8 articles.
1. 1) M. Yamamoto: Nucl. Instr. Meth. Phys. Res. A, 467-468 (2001) 1282.
2. Development of a period-by-period EUV multilayer milling system for the final nm figure error correction by 0.1 nm per period
3. 3) A. Tosaka, Y. Sakai, T. Tsuru and M. Yamamoto: J. Vac. Soc. Jpn., 51 (2008) 115 [in Japanese].
4. 4) T. Namioka and K. Yamashita: X-ray imaging optics (Baifu-kan, Japan, 1999) 1st ed., Chap. 2, pp. 72-73 [in Japanese]
5. 5) C. W. Gwyn, R. Stulen, D. Sweeney and D. Attwood: J. Vac. Sci. Technol. B, 16 (1998) 3142.
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