Liquid Delivery Metal-Organic Chemical Vapor Deposition of Pb(ZrxTi1-x)O3Thin Films for High-Density Ferroelectric Random Access Memory Application-Reference-Cited by-同舟云学术

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Liquid Delivery Metal-Organic Chemical Vapor Deposition of Pb(ZrxTi1-x)O3Thin Films for High-Density Ferroelectric Random Access Memory Application

Published:2002-11-30 Issue:Part 1, No. 11B Volume:41 Page:6690-6694
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lee June Key,Lee Moon-Sook,Hong Sungho,Lee Wanin,Lee Yong Kyun,Shin Sangmin,Park Youngsoo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=11S/a=6690/pdf

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4. Ferroelectric Random Access Memory;Nanotechnology;2010-07-15

5. Comparison of PbZr1−xTixO3 thin films deposited on different substrates by liquid delivery metal organic chemical vapor deposition;Journal of Applied Physics;2009-03-15

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