Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films
Author:
Affiliation:
1. Department of Chemical Engineering
2. Hanyang University
3. Seoul
4. Korea
5. Department of Chemistry
6. UNIST
7. Ulsan
Abstract
Heteroleptic titanium alkoxides with three different ligands, i.e., [Ti(OiPr)(X)(Y)] (X = tridentate, Y = bidentate ligands), were synthesized to find efficient metal organic chemical vapor deposition (MOCVD) precursors for TiO2 thin films.
Funder
Ministry of Trade, Industry and Energy
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2018/DT/C7DT04894G
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