Computational Studies on the Erosion Process in a Magnetron Sputtering System with a Ferromagnetic Target-Reference-Cited by-同舟云学术

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Computational Studies on the Erosion Process in a Magnetron Sputtering System with a Ferromagnetic Target

Published:1998-03-15 Issue:Part 1, No. 3A Volume:37 Page:965-969
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ido Shunji,Suzuki Takeshi,Kashiwagi Mieko

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems;Coatings;2023-04-07

2. Theory and molecular simulations of plasma sputtering, transport and deposition processes;The European Physical Journal D;2023-02

3. Curved-boundary particle-in-cell simulation for the investigation of the target erosion effect of DC magnetron sputtering system;AIP Advances;2020-12-01

4. Transient evolution of the target erosion profile during magnetron sputtering: Dependence on gas pressure and magnetic configuration;Surface and Coatings Technology;2017-10

5. Growth of Target Race Track Profile during Magnetron Sputtering;Journal of the Vacuum Society of Japan;2015

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