Preparation of Germanium Nitride Films on the Stained Germanium Crystal Surface
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Germanium Surface Conditioning and Passivation;Handbook of Cleaning in Semiconductor Manufacturing;2011-02-22
2. Theoretical prediction of the structural and electronic properties of pseudocubic X3As4 (X=C, Si, Ge and Sn) compounds;Physica B: Condensed Matter;2009-06
3. Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques;Applied Physics Letters;2007-04-02
4. Ge metal-insulator-semiconductor structures with Ge3N4 dielectrics by direct nitridation of Ge substrates;Applied Physics Letters;2004-10-11
5. Electronic structure of Ge3N4 possible structures;International Journal of Quantum Chemistry;2000
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