Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition-Reference-Cited by-同舟云学术

Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition

Published:2009-06-22 Issue:6 Volume:48 Page:06FF12
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Murakami Katsuhisa,Matsubara Naoki,Ichikawa Satoshi,Kisa Toshiya,Nakayama Takahito,Takamoto Kunio,Wakaya Fujio,Takai Mikio,Petersen Silke,Amon Brigitte,Ryssel Heiner

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference11 articles.

1. Fabrication and characterization of platinum nanocrystalline material grown by electron-beam induced deposition

2. Direct electron-beam patterning for nanolithography

3. New selective deposition technology by electron-beam induced surface reaction

4. Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition

5. Observation of fringelike electron-emission pattern in field emission from Pt field emitter fabricated by electron-beam-induced deposition

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