Electron beam deposition for nanofabrication: Insights from surface science-Reference-Cited by-同舟云学术

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Electron beam deposition for nanofabrication: Insights from surface science

Published:2011-02 Issue:3-4 Volume:605 Page:257-266
ISSN:0039-6028
Container-title:Surface Science
language:en
Short-container-title:Surface Science

Author:

Wnuk J.D.,Rosenberg S.G.,Gorham J.M.,van Dorp W.F.,Hagen C.W.,Fairbrother D.H.

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference115 articles.

1. Gas-assisted focused electron beam and ion beam processing and fabrication

2. Insulating Films Formed Under Electron and Ion Bombardment

3. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

4. A critical literature review of focused electron beam induced deposition

5. Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions

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